As the most important urban agglomeration in Northwestern China, the ozone pollution in Guanzhong region has gradually become a prominent problem affecting local air quality in recent years. It is of great significance to explore its spatio-temporal variation characteristics and influencing factors for the atmospheric environment management in this region. Based on hourly mass concentration data of ozone from state-controlled environmental monitoring stations and hourly meteorological data from national meteorological stations in five cities of Guanzhong region from 2014 to 2020, the characteristics of near-ground ozone pollution and its meteorological influencing factors were analyzed comparatively. The results are as follows: (1) The ozone had gradually replaced PM₁₀ as the primary air pollutant after PM_2.5 in Guanzhong region in recent 7 years, and the proportion of days with ozone as the primary pollutant had a fluctuant increasing trend in the whole. (2) The monthly distributions of ozone mass concentration in five cities of Guanzhong region appeared a typical single-peak pattern, the ozone mass concentration was higher in summer (from June to August), and the value of concentration in Xi’an, Xianyang, Weinan, Tongchuan and Baoji decreased in order. The diurnal variations of ozone mass concentration also showed a single-peak pattern, with the trough from 07:00 to 08:00 and the peak from 15:00 to 16:00 in five cities of Guanzhong region. (3) When the maximum temperature is higher than 36 ℃, relative humidity is between 45% and 70% and the average wind speed is between 2 and 3 m·s^-1, the ozone is easy to exceed the standard in Guanzhong region, and the higher maximum temperature is, the greater exceeding standard rate of ozone is. The favorable wind direction to ozone pollution in Xi’an, Tongchuan, Xianyang and Weinan is NE, while that in Baoji is SE or NW. (4) The easterly route from the central and western parts of Henan Province is the most important transport route affecting ozone concentration in summer in Xi’an City. Except for neighbour cities of Shaanxi Province, the central and western Henan Province, Yuncheng of Shanxi Province and the northern Hubei Province are also major potential sources of O₃ pollution in Xi’an City.